The first subsection deals with the description of physical. The application gallery features comsol multiphysics. Electrostatic combdrive actuator for mems relaysswitches. What is the best way to start with comsol multiphysics. This model analyzes an rf mems switch consisting of a thin micromechanical bridge suspended over a dielectric layer. The electrical current and the heat flow from one part to the other only through the contact surface. Comsol multiphysics and its gui but would like to learn more about how to set up a certain model. Finally, the switching performance of the novel cantilever.
An automated design tool using comsol multiphysics 3. Modelling of different mems pressure sensors using comsol. Rfmems is used for making antennas, filters, switches, relays, rams microphones, microphones, and so on. You can even use these entries as a starting point for your own models that are similar in nature. The first subsection deals with the description of physical architecture of the gas sensor system. In this simulation, we look into the fluid velocity, beam stress, force versus time and beam tip displacement in x and y directions. Mems accelerometeracceleration transducer,sensor,working. Mems relaysswitches have been some of the most interesting hotspots in all kinds of mems devices for decades. The structure of the switch consists of a cpw coplanar waveguides transmission lines and a suspended membrane. The device was comprised of a fixedfree polysilicon microcantilever beam with electrostatic actuation and capacitive sensing. Design of high sensitivity and fast response mems capacitive. Capacitive sensors can be virtually designed using a powerful 3d modeling software, comsol.
Aug 17, 2011 optical mems is used for making projectors, optical fiber switch and so on. Mems pressure sensors have widely used in automotive, biomedical and industrial applications. Analysis and simulation of mems based multiple gases. Read this book if you are new to comsol multiphysics. Comparative study of cantilever rf mems switch sciencedirect. The design optimization by varying geometry, layer the device without actual fabrication. Comsol, comsol multiphysics, comsol script, comsol reaction engineering lab, and femlab are registered. For reliable ohmic switch, it is mandatory to select the appropriate contact material for switch. Geometry of the rf mems switch as modeled in comsol multiphysics together with the mems module.
The finite element model was established by comsol version 5. Mems switch simulation in microwave office tutorials. Apr 02, 2012 donate and download files in full hd here. Mems switch simulation in microwave office tutorials hello yammuna, it is probably more difficult to bring the mems into new mwo environment than to work with standalone aplac. A novel inplane electrostatic combdrive actuator for mems relaysswitches was designed and fabricated.
In this appendix, we show how to do the following using comsol step by step. You can also open a pdf documentation which details the reactor model and a stepbystepprocedure to create this comsol module from scratch. You are also more than welcome to send off a quick question to us and find out more. An overview of rf mems switches free download as powerpoint presentation. A novel design of cantilever rf mems series switch iosr journal. Thus, have a good understanding on the fluidstructure interaction behavior is critical to guide the mems device design. Runnable applications have instructions on how to use the application. Singh et al analysis and simulation of mems based multiple gases detection system using comsol is based on tube geometry with nanoengineered pores 15, 16. Tutorial on comsol multiphysics platform comsol is a multiphysics platform, which will be used to do all your simulations. This paper presents a novel design of a rf mems switch. This tutorial shows how to couple three physics interfaces to model evaporative cooling. Many of these devices are being used either as actuators or sensors. Comsol lep tutorial for tank flow system two cstr in series step 1. Comsol is the perfect tool for simulating mems and piezoelectric devices and applications.
Following the steps given in the documentation of the comsol heat conduction in a slab tutorial see next page. Comsol multiphysics applied to mems simulation and design. It also provides a quick introduction to creating applications using the application builder. How to calculate the pullin voltage of rf mems switch in. Comsol lep tutorial for tank flow system two cstr in series. Simulating mems and smart materials with comsol multiphysics. Use of comsol multiphysics for automated electrostatic mems. Right click on the solid mechanics node and select fixed constraint. The paper provides path forwards in reduction of actuation. Comsol multiphysics, finite element analysis fem tool. If you work with microelectromechanical systems mems, integrating the various physics is a key concern. I referred to the tutorial given in mems module for resonator pull in voltage calculation and tried to simulate a switch. The wet surface feature is used to implement the source term for the water vapor and to. Chapter 6 contact studies for reliable ohmic switch.
In the recent past, there have been a number of researches on integrated gas sensors tailored for various applications such as disease detection, pollution monitoring and many more. Tutorial models have documentation that includes the theoretical background and stepbystep instructions. This work presents the study of spiral rf mems switch which has low actuation voltage due to spiral structure. This model illustrates how to implement a multiphysics contact. Mems module multiphysics coupling for hygroscopic swelling. For example, novel spring structures have been exploited to reduce the actuation. Modeling mems and piezoelectric devices comsol multiphysics. As i am very new to comsol multiphysics, its very difficult for me to find the procedure for. It provides the user with the flexibility to model the sensor using a simple 2d user interface that can be easily transformed into a 3d model.
The design and simulation of different pressure sensors such as capacitive, piezoelectric and piezoresistive mems pressure sensors are also proposed in this paper. Test out how it can work for you by attending a free handson workshop where a complimentary trial of comsol multiphysics and its modules will be made available for you. Model library guide the following table summarizes key information about the entries in this model. A perfectly matched layer is used to represent the essentially infinite substrate.
Design and simulation of mems based microhotplate as gas sensor. Microcantilever based rf mems switch for wireless communication. This tutorial demonstrates how to set up a simple static structural analysis. The contact switch device has a cylindrical body and plate hook shapes at the contact area. It models the thermal and electrical behavior of two contacting parts of a switch.
Comsol, the comsol logo, comsol multiphysics, comsol desktop, comsol compiler, comsol server. Femlab heat transfer tutorial rev rowan university. Most of the previous designs were based on the microarray type. Click this button to switch to the application builder and start building an application based on your model. Department of electronics and communication engineering, periyar maniammai university, vallam, thanjavur 64. Multiphysics modeling of mems devices november 20 executive summary 2 mems devices can be categorized based on their functionality and application area. Multiphysics modeling of mems devices november 20 executive summary power is increased with dedicated tools. Open chapter and click on comsol tab present in the bottom of the page step 2. The effects that need to be taken into account are heat transfer, transport of water vapor, and fluid flow. Mems microactuators enabling new and unforeseen applications. The application libraries the application libraries are collections of mph files containing tutorial models and runnable applications with accompanying documentation. Most of the following steps apply on other models 2 p a g e p r e p a r e d b y e n g. Comsol multiphysics has wide range of functionalities. As mems switches are widely used in different actuation of electrostatic, electromagnetic.
The equations that comsol solves are displayed in the equation section of the settings window. Review on analytical design, simulation, fabrication. In this application note, only the electrostatics part of mems module will be discussed. Design of high sensitivity and fast response mems capacitive humidity sensor using comsol multiphysics r. However, this could significantly consume huge space on the substrate. Specifically it will be shown how to approach a 3d electrostatics problem by first creating a 2d geometry using the array tools and then extrude it to a 3d geometry. Need help in rf mems switch simulation using comsol.
I sheared for you a model of rf mems switch in comsol via pdf. Steeneken parameter extraction and supportloss in mems resonators, comsol users conference 2007, grenoble. Use of comsol multiphysics for automated electrostatic. In the comsol multiphysics software any number of physics can be combined in one and the same simulation. Design and fabrication of a novel mems relay with low. The switch is a capacitive type, which is actuated by an electrostatic force. We first start with an example on a very simple electrostatic actuated rf mems switch.
An accelerometer is an electromechanical device that is used to measure acceleration and the force producing it. Modeling using the graphical user interface3d example. It is designed to work at both 60 ghz and 77 ghz through mems switches. By creating an accurate model in comsol multiphysics, you will see how the electrical, thermal, structural, and fluid components interact with each other.
Click on comsol access present at the bottom of the page. Design and fabrication of a reconfigurable memsbased. The tutorial is based on a paper presented at the comsol conference 2007 in grenoble p. I am new to comsol, does anyone know how to simulate rf mems switch in comsol.
Rather, than reading books on comsol, i suggest please start using comsol because when you will start, you will find many errors, may be physics. Comparative study of perforated rf mems switch cyberleninka. A dc voltage greater than the pullin voltage is applied across the switch, causing the bridge to collapse onto the dielectric layer with a resulting increase in the capacitance of the device. The simulation is done using comsol multiphysics software. I need some tutorials on mems switch simulation in microwave office.
I have been trying to find out the pull in voltage of a very basic cantilever based mems switch. Micromirror for optical coherence tomography used in medical diagnosis. To test your mems devices performance and reliability before manufacturing, you can simulate your design using multiphysics software. Tutorial for running comsol files from comsol website. Comsol multiphysics software has been used for simulation of mems switches. Apr 27, 2017 simulating mems and smart materials with comsol multiphysics smart materials are materials whose properties or shape respond dynamically to stimuli in their environment. It provides an overview of the comsol environment with examples that show you how to use the comsol desktop user interface and the model builder. Electrostatic actuation is the most popular actuation principle. Submit a plot similar to figure 52 in the documentation. Modelling of different mems pressure sensors using. Modelling of different mems pressure sensors using comsol multiphysics. Comsol multiphysics reference guide 19982012 comsol protected by u. The analysis is exemplified on a combination wrench during the application of torque on a bolt. In a switch like this, the bridge responds to an applied electric potential and voltage by pulling down on the film.
How to calculate the pullin voltage of rf mems switch in comsol. This paper presents the basic introduction of mems pressure sensors. Electromagnetics modeling in comsol rf module highfrequency modeling. Electromagnetics modeling in comsol multiphysics the acdc and rf modules. Design and simulation of mems based microhotplate as gas. Scribd is the worlds largest social reading and publishing site. This archived webinar shows you that by designing mems devices with numerical simulation, you can achieve the highest possible performance. Comsol multiphysics applied to mems simulation and design dr. This systematic approach can save time and cost of device fabrication 5. In this paper we simulated the cantilever switch with various shapes. Piezoelectric devices and rf mems available in the mems module, structural mechanics module, and acoustics module mix dielectric, conductive, structural, and. Tutorial for running comsol files from comsol website step 1.
With an interest of providing a cost effective solution, a novel micro. Setting the fixed constraint at the four edges of the diaphragm. The equations change based on the equation form selected. The different types of pressure and its operating principles also included. Despite its simplicity, and the fact that very few engineers would run a structural analysis before trying to turn. Design of a memsbased fractal antenna miguel angel galicia martinez this thesis presents the design and fabrication of a customized in house micro electromechanicalsystems mems process based onchip antenna that is both frequency and polarization reconfigurable.
For example, piezoelectric materials experience strain under an applied electric field, while magnetostrictive materials deform in the presence of a magnetic field. The comsol multiphysics software is used for the designing and simulation of different mems pressure sensors. Rf dc contact mems switch for reconfigurable antennas. You can even use these entries as a starting point for your own. Design, simulation and a comparative study of square, rectangular. I have a shunt switch simulated under coventor shows pull in.
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